About DSE
Faculty
Name
Sarah Eunkyung Kim
MAJOR
Semiconductor Processing, Advanced Semiconductor Packaging
TEL
02-970-6599
E-mail
eunkyung@seoultech.ac.kr
Biography
1998.05 Rensselaer Polytechnic Institute, Materials Science and Engineering (Ph.D.)
1993.05 Massachusetts Institute of Technology, Materials Science and Engineering (M.S.)
1991.12 Rensselaer Polytechnic Institute, Materials Science and Engineering (B.S.)
Careers
2007 – Present Seoul National University of Science and Technology (Professor)
2022 – 2024 Advanced Semiconductor Center at Seoul Tech (Director)
2020 – Present ELSPES Inc. (Techno-Strategic Advisor)
2021 – 2023 National Research Foundation of Korea (Review Board)
2021 – 2023 Intellectual Property Trial and Appeal Board (Technical advisor)
2018 – 2020 Technical Consultant at TSE
2014 – 2015 Technical Consultant at SK Hynix
2005 – 2007 Korea Institute of Science and Technology (Sr. Scientist)
1998 – 2005 Intel (Engineering Manager)
1994 – 1994 Samsung Electronics (Engineer)
Research Areas
Advanced Semiconductor packaging
Semiconductor Processing
Electronic Materials
Journal Papers
◾ Effect of Process and Design Parameters in Cu/SiCN Hybrid Bonding Process: A Finite Element Analysis Study, IEEE TRANSACTIONS ON COMPONENTS, PACKAGING AND MANUFACTURING TECHNOLOGY,, No.15 pp.2492~2500, 2025김사라은경
◾ Electroless Pd Nanolayers for Low-Temperature Hybrid Cu Bonding Application: Comparative Analysis with Electroplated Pd Nanolayers, ELECTRONICS, vol.14 No.19, 2025김사라은경
◾ Characterization of Thermal Conductance of Copper-to-Copper Bonded Interconnects with Metal Passivation for Three-Dimensional Integration, ELECTRONIC MATERIALS LETTERS, vol.21 No.6 pp.829~842, 2025김사라은경
◾ Effects of Au Passivation Thickness on Improving Low-Temperature Cu-to-Cu Bonding Interface, IEEE TRANSACTIONS ON COMPONENTS PACKAGING AND MANUFACTURING TECHNOLOGY, vol.15 No.6 pp.1351~1358, 2025김사라은경
◾ C2H4 reductive plasma treatment on copper surface for copper bonding, MATERIALS RESEARCH EXPRESS, vol.12 No.5, 2025김사라은경
◾ Layout Design Strategies for Scaling Down Semiconductor Systems Based on Current Flow Analysis in Interconnect, APPLIED SCIENCES-BASEL, vol.15 No.7, 2025김사라은경
◾ Effect of Ar/N2 Two-Step Plasma Treatments on the Interfacial Characteristics of Low-Temperature Cu-Cu Direct Bonding, ELECTRONIC MATERIALS LETTERS, vol.21 No.3 pp.429~442, 2025김사라은경
◾ Characteristics of PVD SiCN for Application in Hybrid Cu Bonding, JOURNAL OF SEMICONDUCTOR TECHNOLOGY AND SCIENCE, vol.25 No.1 pp.102~108, 2025김사라은경
◾ Understanding and Optimizing Oxygen Plasma Treatment for Enhanced Cu-Cu Bonding Application, IEEE ACCESS, vol.13 pp.20160~20170, 2025김사라은경
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