학력
1998.05 Rensselaer Polytechnic Institute, Materials Science and Engineering (Ph.D.)
1993.05 Massachusetts Institute of Technology, Materials Science and Engineering (M.S.)
1991.12 Rensselaer Polytechnic Institute, Materials Science and Engineering (B.S.)
주요 경력
2007 – Present Seoul National University of Science and Technology (Professor)
2022 – 2024 Advanced Semiconductor Center at Seoul Tech (Director)
2020 – Present ELSPES Inc. (Techno-Strategic Advisor)
2021 – 2023 National Research Foundation of Korea (Review Board)
2021 – 2023 Intellectual Property Trial and Appeal Board (Technical advisor)
2018 – 2020 Technical Consultant at TSE
2014 – 2015 Technical Consultant at SK Hynix
2005 – 2007 Korea Institute of Science and Technology (Sr. Scientist)
1998 – 2005 Intel (Engineering Manager)
1994 – 1994 Samsung Electronics (Engineer)
연구 분야
Advanced Semiconductor Packaging
Semiconductor Processing
Electronic Materials
저널 논문
◾ Reactive Sputtering of SiCN Films: Process Optimization and Bonding Behavior for Cu Hybrid Bonding, JOURNAL OF ELECTRONIC MATERIALS, vol.55 No.1 pp.1222~1233, 2026김사라은경
수상
◾ Geometry driven effects of Cu dishing and Cu bonding interface integrity, Best Paper Award, 한국마이크로전자및패키징학회, 2025김사라은경
◾ Analysis of PCV SiCN film characteristics for Cu/SiCN hybrid bonding, Best Paper Award, 한국마이크로전자및패키징학회, 2023김사라은경
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